ISO 19383:2026
International Standard
Current Edition
·
Approved on
01 June 2026
Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors
ISO 19383:2026 Files
English
13 Pages
Current Edition
USD
123.74
ISO 19383:2026 Scope
This document defines the chemical characteristics and related process specifications of atomic layer deposition precursors, including assay content, metal purity and anion content specification.
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