This document specifies a procedure for the determination of the averaged interface position between two different layered materials recorded in the cross-sectional image of the multi-layered material. This document does not apply for determining the simulated interface of the multi-layered materials expected through the multi-slice simulation (MSS) method.

This document is applicable to the cross-sectional images of multi-layered materials recorded using a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) and cross-sectional elemental mapping images using an energy dispersive X-ray spectrometer (EDS) or an electron energy loss spectrometer (EELS). This document is also applicable to digitized images recorded on an image sensor built into a digital camera, a digital memory set in the PC or an imaging plate, where the digitalized image is obtained by converting an analogue image recorded on photographic film using an image scanner.