GSO ISO 23131:2025

ISO 23131:2021
Gulf Standard   Current Edition · Approved on 22 April 2025

Ellipsometry — Principles

GSO ISO 23131:2025 Files

English 15 Pages
Current Edition Reference Language
USD 127.1

GSO ISO 23131:2025 Scope

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

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